Structure and Oxidation Resistance of Mo-Y-Zr-Si-B Coatings Deposited by DCMS and HIPIMS Methods Using Mosaic Targets

In this study, Mo-(Y,Zr)-Si-B coatings were obtained by direct current magnetron sputtering (DCMS) and high-power impulse (HIPIMS) using mosaic targets. The results showed that the addition of Y Zr into composition Mo-Si-B led to suppression columnar grain growth, a decrease in crystallite size h-MoSi2 phase from ~50 ~5 nm, an increase amorphous crystalline phases ratio Doping coating with promoted oxidation resistance at temperature 1000 °C. introduction yttrium contributed their crack when heated 1300 High was provided defect-free SiO2 + MoO3 Y2O3 surface layer. transition DCMS mode HIPIMS decreased texture coatings. use rate Mo-(Y)-Si-B T = °C 1.6–4.5 times compared DCMS. case Mo-Y-Si-B coatings, more than 50% thickness oxide layer